KLA-Tencor Announces New Teron™ SL650 Reticle Inspection System (NASDAQ:KLAC)

MILPITAS, Calif., May 20, 2014 /PRNewswire/ -- Today, KLA-Tencor Corporation (NASDAQ: KLAC) announced the Teron™ SL650, a new reticle quality control solution for IC fabs that supports 20nm design nodes and beyond. With 193nm illumination and multiple STARlight™ optical technologies, the Teron SL650 provides the sensitivity and flexibility required to assess incoming reticle quality, monitor reticle degradation and detect yield-critical reticle defects, such as haze growth or contamination in patterned and open areas. In addition, the Teron SL650's industry-leading production throughput supports the fast cycle times required to qualify the increased number of reticles associated with advanced multi-patterning techniques.



KLA-Tencor Announces New Teron™ SL650 Reticle Inspection System (NASDAQ:KLAC)