KLA-Tencor Introduces Inspection and Review Portfolio for Leading IC Technologies (NASDAQ:KLAC)

SAN FRANCISCO, July 7, 2014 /PRNewswire/ -- Today at SEMICON West, KLA-Tencor Corporation (NASDAQ: KLAC) announced four new systems—the 2920 Series, Puma™ 9850, Surfscan® SP5 and eDR™-7110—that provide advanced defect inspection and review capability for the development and production of 16nm and below IC devices. The 2920 Series broadband plasma patterned wafer, Puma 9850 laser scanning patterned wafer, and Surfscan SP5 unpatterned wafer defect inspection systems deliver enhanced sensitivity and significant throughput gains. By enabling discovery and monitoring of yield-critical defects, these inspectors support chipmakers' integration of complex structures, novel materials and new processes at leading-edge design nodes. Each of the inspection systems seamlessly connects with the eDR-7110 electron-beam review system, which utilizes improved automatic defect classification capability to quickly identify detected defects, providing chipmakers with accurate information for determining corrective action.



KLA-Tencor Introduces Inspection and Review Portfolio for Leading IC Technologies (NASDAQ:KLAC)